Microstructure-related magnetic properties in Co-implanted ZnO thin films

Abstract

Highly textured ZnO thin films were implanted with Co ions at fluences of 1 × 1016 and 1 × 1017 ions cm−2. Although their microstructure observed by analytical high-resolution electron microscopy was very different, SQUID magnetometer measurements showed qualitatively similar magnetic properties. In the low-fluence film, only small modifications, such as a slight amorphization, planar defects or very small (<1–1.5 nm) Co clusters, were hardly observable. Implantation at a higher fluence led to important changes in the film structure: heavy amorphization and metallic Co precipitates were identified by electron diffraction, energy dispersive x-ray spectroscopy (EDS), electron energy loss spectroscopy and scanning transmission electron microscopy spectrum imaging. EDS microanalysis additionally revealed the presence of ∼2 at% Co atoms that were likely dissolved in the ZnO lattice at the atomic level. No Co oxides or other secondary oxide phases were detected. For both implanted samples, the dimensions of Co precipitates were below the superparamagnetic limit at room temperature. Thermo-magnetization curves and magnetic hysteresis loops measured in the temperature range from 5 to 300 K indicated two superimposed magnetic regimes, one predominant above 50 K and the other below 50 K. We analysed the possible mechanisms and quantitative contributions to explain the observed magnetic behaviour at low and room temperature.