Abstract
2.5 μm thick TiAlCN/VCN coatings were deposited by reactive HIPIMS process. XTEM showed gradual evolution of the structure of the coating with thickness. The initial structure is nanoscale multilayer with sharp interlayer interfaces. This transforms to nanocomposite of TiAlCN and VCN nanocrystalline grains surrounded by C-rich tissue phase and finally changes to an amorphous carbon rich Me-C phase. Energy-resolved mass spectrometry revealed that HIPIMS plasma is a factor of 10 richer in C1+ ions, and therefore more reactive, as compared to the plasma generated by standard magnetron discharge at the same conditions. The peculiar structure evolution in HIPIMS is is attributed to target poisoning effect.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: IOP Conference Series: Materials Science and Engineering
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
