Abstract
Erbium oxide (Er2O3) was shown to be a high potential candidate for tritium penetration barrier and electrical insulator coating for advanced breeding blanket systems such as liquid Li, Li-Pb or molten-salt blankets. Recently, Hishinuma et. al. succeeded to form Er2O3 coating layer on large interior surface area of metal pipe using Metal Organic Chemical Vapor Deposition (MOCVD) process. In this work, Er2O3 coating layer of hydrogen penetration control on stainless steel 316 (SUS 316) substrate have been investigated to the effect of hydrogen penetration and using SEM, TEM and SAED patterns. Er2O3 coating layer of before hydrogen penetration was granular structures from SEM observation. Er2O3 coating layer was columnar grains from TEM observation. TEM image and SAED patterns obtained from Er oxide film can be understood that the growth direction of Er2O3 film was [110].
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