Abstract
The surface microstructure of c-axis EuBa2Cu3Oy thin films sputtered onto MgO (001) are characterized by high-resolution scanning electron microscopy (SEM). The SEM images of films grown at a substrate temperature Ts of 600°C, which is lower than our optimum Ts (650°C) for c-axis growth, clearly show evidence of growth steps and spirals at the film surface. The heights of growth steps estimated from the tilted views are 4-5 nm, which correspond to 3-4 unit cells of the c-axis.
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