Microstructure, Mechanical, and Tribological Properties of CN x Thin Films Prepared by Reactive Magnetron Sputtering

Abstract

The microstructure, mechanical, and tribological properties of the carbon nitride (CN x ) thin films with different nitrogen contents deposited on high-speed steel substrates by reactive magnetron sputtering were studied. CN x films with nitrogen contents from 10.7 to 28.2 at.% had an amorphous structure composing of the carbon bonds of sp2C–C, sp2C–N, and sp3C–N. The TiN inter-layer cause the adhesion of CN x films enhancement. The more nitrogen concentration led to larger film hardness and friction coefficient against GCr15 steel balls, but the wear rates decreased.