Microstructure, Mechanical, and Scratch Resistance Properties of TiAlCrNbN-Graded Composite Coating Deposited on AISI H13 Steel Substrate with Pulsed DC Closed Field Unbalanced Magnetron Sputtering Method

Abstract

Structure and adhesion properties of TiAlCrNbN coatings were investigated. These coatings were deposited onto AISI H13 steel substrate using pulsed dc closed field unbalanced magnetron sputtering at different deposition parameters including duty cycle, bias voltage, and working pressure. The coatings have been characterized by X-ray diffraction, scanning electron microscopy and energy dispersive spectroscopy. The TiAlCrNbN-graded composite coatings have a dense and columnar structure. The X-ray diffraction patterns of coatings exhibited predominantly c-TiAlCrN, h-NbN, and h-TiAlN reflections. Scratch resistance test showed that the highest adhesion strength was attained as 68 N at 2.5 μs duty time, 100 V bias voltages, and 3 × 10−3 Torr deposition parameters. The lowest adhesion strength was obtained as 55 N at 0.5 μs duty time, 50V bias voltage, and 2 × 10−3 Torr deposition parameters.