Abstract
FeTa and FeTaN thin films have been fabricated by sputter depositionfrom separate Fe and Ta magnetron sources. Microstructural investigationsrevealed that FeTa binary alloy films undergo a nanocrystalline to amorphoustransition at about 17 at% Ta. This transition is associated with rapidsimultaneous reductions in coercivity and saturation magnetization andincreases in hardness and resistance to plastic deformation. Below 17 at% Tathe films exhibit a single-phase bcc structure and their lattice spacingincreases linearly with Ta addition in agreement with Vegard's law, whichindicates the incorporation of Ta in substitutional sites. The grain size andcoercivity of the bcc binary films is seen to increase considerably withincreasing Ta content. The addition of nitrogen causes a decrease in grainsize, which is accompanied by a reduction in coercivity and an enhancement ofhardness.
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