Abstract
It is observed that arc evaporated coatings are characterized by ideal fibre textures, while in case of magnetron sputtering there is no rotational symmetry of the coating texture. Depth dependent X-ray diffraction measurements of the texture and accompanying studies using the transmission electron microscopy indicate that the first monolayers of reactive magnetron sputtered TiN-coatings grow nearly statistically on the substrate, while an epitaxial growth is observed in case of reactive arc evaporation. As the film thickens an intrinsic texture is formed which depends only on the deposition parameters. Furthermore, in case of reactive magnetron sputtering it is shown that microstructural gradients can be influenced tailor-made using time dependent variations of the bias voltage.
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