Abstract
Al-Mg alloy films were prepared on cold-rolled steel substrates by direct current magnetron sputtering using a target with a nominal composition of 75 at.% Al-25 at.% Mg and their microstructures were investigated. All the films showed a face-centered cubic Al phase regardless of the presence of Mg and various sputtering conditions. Importantly, two typical microstructures evolved with respect to the input power density and working pressure. One was a smooth, flat surface with a dense, featureless cross section. The other was a dome-shaped, rough surface with a columnar structure. A phenomenological explanation is presented for the microstructure evolution based on the kinetics of film growth.
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