Abstract
Large-area direct current (DC) discharges were generated using planar microelectrode arrays (MEAs) with electrode distances between 50 and 250 μm. A homogenous diffuse light emission with a typical thickness of approximately 0.5–1.5 mm was observed. The discharge can be operated over a wide pressure range with sustaining voltages of only a few 100 V DC and showed the characteristics of a normal glow discharge. Possible areas of application of the MEA were surface modification of materials, plasma chemistry, pollution control and as light sources. The discharge was characterized via optical emission spectroscopy (OES). The temperature of excited species in the discharge was derived from OH emission spectra. A temperature of about 3000 K was calculated. Laser-induced fluorescence (LIF) spectra of NO (A 2 Σ←X 2 Π 1/2) in the ground state indicated that the gas temperature of the discharge was only a few ten degrees above room temperature.
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