Abstract
Cr doped graphite-like carbon (Cr–GLC) graded coating with Cr bottom layer, Cr/C composition gradient layer and Cr–GLC top layer was deposited by unbalanced magnetron co-sputtering of pure chromium and graphite targets. The microstructure, composition and properties including adhesion strength, wear resistance of the as-fabricated Cr–GLC graded coating were investigated by TEM, XPS, scratch test and sliding friction test. Three kinds of phases are detected in the graded layer: pure Cr, a Cr/C nanocrystalline/amorphous phase and amorphous carbon. The HRTEM observation for Cr–GLC top layer with 3 at% Cr indicates that Cr-enriched clusters are embedded in an amorphous carbon matrix. Results of the investigation demonstrate that strong adhesion and stable friction coefficient of the Cr–GLC graded coating are attributed to the consecutive interface microstructure in the coating caused by the interlayer design.
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