Microstructure characterization of sol-gel derived PZT films

Abstract

The crystallization of sol-gel derived amorphous PZT films deposited on a MgO single-crystal substrate and a SiO2 glass substrate was examined. The pyrochlore crystallites, 5 nm in size, were homogeneously nucleated in the amorphous films at 350 °C. The nucleation temperature of pyrochlore did not depend on the type of substrate. Fine pyrochlore grains were stable even during annealing at high temperatures up to 600 °C. The perovskite formation temperature was dependent on the substrate, and was about 550 °C on the MgO single-crystal substrate and about 750 °C on the SiO2 glass substrate. The perovskite was heterogeneously nucleated preferentially at the substrate-film interface. Perovskite nucleation was more difficult at the SiO2 glass-film interface than at the MgO single crystal-film interface. The ease of nucleation reflected the perovskite formation temperature. Perovskite crystals grew fairly rapidly, once they were nucleated in the films. In the multiple-coated films, the interface between successive layers of PZT films was a favourable nucleation site of perovskite, and the columnar perovskite grains passing through the interface were often developed.