Abstract
ABSTRACT Microstructures of piezoelectric single crystal substrates have been characterized by omega − 2θ & omega − rel of TAXRD, DSC, SPM and SEM, which include X-112° Y LiTaO3 and AT36°Y-X quartz for SAW devices with electric properties normal and degradation. Relations between substrate microstructure and property degradation are investigated. The effects of tilts and lattice constant in a sample are separated by omega − 2θ & omega − rel, and substrates inhomogeneity determined using DSC & TAXRD. Researches indicate that reasons for quartz's degradation are substrate inhomogeneous, existing different piezoelectric phase-transition structures, one being the β quartz and the other abnormality, which phase-transition temperature is between 574.9∼577°C, and occur mosaic structure and over roughness surface, and causes for LiTaO3′s degradation are mosaic structure and different Li2O composition.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
