Abstract
Surface-textured Mo thin film is fabricated by magnetron sputtering through the adjustment of deposition parameters, which exhibits a high absorptance of 0.80 and a low emittance of 0.09. The single-layer Mo deposited on stainless steel (SS) is characterized by x-ray diffraction (XRD), ultra-high resolution scanning electron microscope, atomic force microscope and optical measurement. The controlled surface roughness combined with larger aspect ratio contributes much to the high absorptance and low emittance. Based on the SS/Mo coating, a spectrally selective coating (SS/Mo/Al2O3) is designed and fabricated. The coating shows an amorphous structure and exhibits an absorptance of 0.90 and an emittance of 0.08. Tauc-Lorentz and Drude free-electron models are used to modeling the optical properties of Al2O3 and Mo layers by phase-modulated spectroscopic ellipsometry.
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