Abstract

Core–shell silicon nanowires (Si-NWs) were synthesized by chemical vapor deposition (CVD) using SiH4 and H2 as precursors. The electron microscopy results revealed that the core shell Si-NW consists of core Si surrounded by thick amorphous silicon oxide (a-SiOx). The diameter of core Si in a core–shell Si-NW was controlled by varying the oxygen flow rate and annealing time. The morphology of core shell Si-NWs is changed to silicon nanocoils (Si-NCs)/silicon nanonoodles (Si-NNs) after being annealed in oxygen atmosphere. The Fourier transform infrared spectroscopy (FTIR) study confirmed the changes of Si–Si and Si–O–Si vibration band and the intensity of Si–O–Si vibration mode increases with decreasing diameter of Si-NWs. The optical properties of core–shell Si-NWs are improved after being annealed in oxygen atmosphere. The chemical bonding and photoluminescence properties of oxygen annealed Si-NWs are also discussed in this article.

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