Abstract
The polycrystalline NbN/TaN superlattice films have been grown on the substrates of 18-8 stainless steel by reactive magnetron sputtering. The microstructure and microhardness of the superlattice films have been studied with X-ray diffraction (XRD), high resolution transmission electron microscopy (HREM) and microhardness tester. The results showed that the NbN layers are of face cubic and the TaN layers are hexagonal crystal structure in the NbN/TaN superlattice films. The lattice plane (111) of NbN are coherent with the (110) of TaN and the lattice mismatch is 3.18%. The NbN/TaN superlattice film demonstrated superhardness effects. The maximum Knoop hardness value reached 5100 kgf/mm2 with a modulation period from 2.3 nm to 17.0 nm. It was proved that even if NbN layers did not take the same crystal structure as TaN layers, hardness anomalous phenomenon still can be produced as long as the coherent strains exist.
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