Abstract
Nano-dual phase TiCuNi metallic glass film having amorphous matrix with some ∼8.5 nm CuTi nanograins dispersed were achieved by magnetron sputtering at deposition temperature of 200 °C. The temperatures below or above that resulted in the totally amorphous or columnar crystalline structures of as-deposited TiCuNi films, respectively. The nano dual-phase TiCuNi metallic glass film exhibited the greatest hardness of 7.5 GPa, which was greatly higher than those of the uncoated Ti6Al4V substrate, amorphous and crystalline TiCuNi films by ∼114.3%, 11.9% and 23.0%, respectively. It also performed the highest wear resistance with the lowest wear rate of 1.32 × 10−5 mm3/Nm, slower than those of the uncoated substrate, amorphous and crystalline TiCuNi by 14.3%, 5.0%, and 7.0%, respectively. This work reveals an effective method to realize nano-dual phase structure of TiCuNi metallic glass films with mechanical properties improved, which is significant for the further development of titanium-based metallic glass films.
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