Abstract

Granular (FePt) 1 − y (SiN x) y ( y = 0–63 vol.%) nanocomposite thin films are fabricated by dc and rf magnetron co-sputtering of Fe, Pt and SiN x targets, then annealed at different temperatures and times. As the SiN x contents raise to 39 vol.%, the (FePt) 1 − y (SiN x) y film has maximum out-of-plane squareness ( S ┴) and the largest out-of-plane coercivity (Hc ┴), they are 0.99 and 21.2 kOe respectively. Saturation magnetization of the (FePt) 1 − y (SiN x) y film is inversely proportional to the SiN x content. From the field emission gun high resolution transmission electron microscope analysis, it is shown that the grain size of (FePt) 37(SiN x) 63 film is about 4 nm. And the Hc ┴, S ┴, and the in-plane squareness ( S //) values of the (FePt) 37(SiN x) 63 film are 6.5 kOe, 0.75, and 0.45, respectively.

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