Abstract
Investigation of the correlation between the microstructure and magnetic properties of Co68Cr20Pt12/Cr thin films which were sputter deposited under different conditions onto 95 mm ultrasmooth NiP/AlMg disk substrates (Ra∼2 Å) has been carried out. Grain morphology characteristics of the films and disk surface roughness were studied by transmission electron microscopy (TEM) and by atomic force microscopy. Tilted-specimen electron diffraction patterns were used to determine the crystallographic texture of the films. The low coercivity of the disks deposited at 100 °C preheated substrates is attributed to the randomly oriented grains of the CoCrPt/Cr layers. Enhancement of the coercivity of the disks deposited on 220 °C preheated substrates is thought to be mainly due to the (112̄0)CoCrPt/(002)Cr crystallographic texture and uniformly distributed grains which are equiaxed in shape. The strength of the (112̄0)CoCrPt/(002)Cr texture can be modified by the Ar gas pressure during the deposition of the Cr underlayer.
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