Abstract
0.7Pb(Mg 1/3 Nb 2/3 )O 3 -0.3PbTiO 3 (PMNT) thin films were prepared on (111)Pt/Ti/SiO 2 /Si substrate by a modified sol-gel process with Nb 2 O 5 as the niobium source. XRD analysis shows that PMNT thin films with pure perovskite were obtained by spin-coating and annealing at 700°C for 20 minutes. The remanent polarization and coercive field of the PMNT thin films are about 7.69μC/cm 2 and 80.75kV/cm, respectively. The dielectric and C-V curve of PMNT thin films are also investigated. The dielectric constant ( e r ) reaches 935 and the dissipation factor (tanδ)is about 0.04 at 1kHz.
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