Abstract
Abstract Strongly pervoskite (1 0 0)-oriented lead zirconate titanate (PZT) films were prepared by the electrostatic spray deposition (ESD). The microstructure and crystalline-granular texture of the films were investigated by scanning electron microscope (SEM) and atomic force microscope (AFM), respectively. The films deposited at substrate temperature of 25 °C and 100 °C were found to have the same crystallite-size distribution around 150–200 nm. With given properties of the spray cloud and the precursor solution, well-crystallized PZT thick films with dense microstructure can be obtained at low deposition temperature. The relative dielectric constant of the 2 μm thick ESD-deposited PZT films with sol–gel PZT films as intermediate layers was as high as 960. The films also exhibit excellent remanent polarization and coercive fields of 12.5 μc/cm2 and 32 kV/cm, respectively.
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