Abstract
C276 alloy layers were deposited on 4140 steel substrates by plasma enhanced magnetron sputtering. The as-deposited 12-μm-thick coatings exhibit a face centered cubic nanocrystalline structure with a grain size of 37–46nm and a uniform composition that replicates the C276 alloy deposition source. The as-deposited coating hardness H=6.2±0.3GPa is four times larger than the known bulk H=1.5–1.9GPa. This is attributed to the small grain size and associated Hall–Petch hardening. Annealing in air for 1h at 600°C, 700°C, and 800°C causes negligible changes in grain size but results in changes in microstructure and texture and a significant increase in H to 7.3–8.5GPa. Compositional maps by Auger electron and energy-dispersive spectroscopies as well as a secondary x-ray diffraction peak suggest that this increase is due to segregation and precipitation of Cr- and Mo-rich regions.
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