Abstract

(Ag,Au)/Si nanocomposite films were deposited using the rf co-sputtering method. The absorption coefficient of Ag/Si nanocomposite film was calculated based on the Maxwell-Garnett theory and differential effective medium(DEM) theory;the experimental results of spectra agreed with the DEM theory.And the possible microstructure and the reason why the plasma resonance absorption peaks were broadened have been discussed.

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