Abstract
Two types of different oxides multifunctional thin films were deposited by PLD technique on the surface of Si and MgO substrates. First of them was CoO doped with Ca content characterized by fcc (halite) structure and second one was perovskite-type LaCoO3 compound. Their microstructure, chemical/phase composition and morphology were examined by means of diverse techniques (SEM, TEM, EDS). For the surface topography observations of thin films the Atomic Force Microscopy (AFM) was applied. Nanohardness and scratch tests (adhesion measurements) were also performed for estimation of (Co,Ca)O and LaCoO3 films mechanical properties and quality. Obtained results confirm that using PLD technique it is possible to carry stoichiometric composition of different compounds from the target to single crystal substrate however the microstructure and properties of obtained thin films are highly influenced by the substrate’s material and laser ablation parameters (laser wavelength, energy density, time and target-substrate distance).
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