Abstract
To explore the microstructure and tribology property evolution of diamond-like carbon (DLC) film with variable Mo concentrations, Mo-doped DLC films were prepared by magnetron sputtering equipment. The results showed that the Mo concentration in the DLC films increased from 2.1 to 30 at% with the Ar/C2H2 gas flow ratio (3:1–9:1). Mo was dispersed in DLC film at a low doping concentration (2.1 at%). Moreover, MoC nanocrystals were present, and a nanocrystal/amorphous microstructure was formed at a high doping concentration (≥8.3 at%). The DLC films with 2.1 at% Mo showed the best adhesion (200 mN) and the minimum wear rate (1.47 × 10−8 mm3/ N·m), and high Mo concentration (≥8.3 at%) was detrimental to wear resistance and adhesion.
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