Microstructural comparison between precursor-based and particle-based PZT ceramic coatings

Abstract

Piezoelectric materials are used in several applications, including sensors and actuators. Perovskite type ferroelectrics, specially, lead zirconate titanate (PZT), due to its excellent dielectric, piezoelectric and ferroelectric properties are usually employed. In this work, a series of Spin Coated PZT thick films were deposited on alumina and stainless steel substrates. These PZT-based films were obtained using inks containing either particles or a precursor that were synthesised using a chemical method. In order to consolidate the deposit as a thick film, a thermal treatment is required after deposition on a substrate. Under temperature exposure, the PZT particles tend to sinter after the elimination of the organic vehicle. Moreover, the PZT precursor transforms to crystalline PZT. Films based on the PZT precursor exhibited many cracks after treatment, while those constituted by PZT particles required sintering temperatures higher than 1000 °C which resulted in unstable PZT structures. As an alternative, slurries forming mixtures of PZT precursor and particles, varying their relative proportions, were studied to improve the properties of the films. Films generated in this study were characterized by SEM and X-ray diffractometry.