Abstract
Cosputtering has been used to manufacture nanocomposite thin films of Ag particles embedded in amorphous SiO 2, nanocrystalline ZnO and amorphous Si. A combination of X-ray diffractometry, high resolution and conventional transmission electron microscopy and electron probe microanalysis has been used to characterize the microstructures of the nanocomposite thin films. In cosputtered nanocomposite AgSiO 2, AgZnO and AgSi thin films the Ag particles are typically 5–25 nm in size.
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