Abstract

Cosputtering has been used to manufacture nanocomposite thin films of Ag particles embedded in amorphous SiO 2, nanocrystalline ZnO and amorphous Si. A combination of X-ray diffractometry, high resolution and conventional transmission electron microscopy and electron probe microanalysis has been used to characterize the microstructures of the nanocomposite thin films. In cosputtered nanocomposite AgSiO 2, AgZnO and AgSi thin films the Ag particles are typically 5–25 nm in size.

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