Abstract
Zirconia was stabilized in thin film form by three ceramic oxides (MgO, CeO 2, Gd 2O 3). Crystallographic and microstructural feature studies were undertaken. X-ray diffraction analysis allowed the stabilization process to be followed as a function of dopant concentration in the ZrO 2 matrix. It was found that for the three systems of interest, the mole percentage of additive oxide needed to stabilize zirconia in a cubic lattice is in agreement with the equilibrium phase diagrams, i.e. more than 14 mol% for MgO, 18 mol% for CeO 2 and 10 mol% for Gd 2O 3. Based on X-ray diffraction measurements, a series of mixed films in ZrO 2MgO, ZrO 2CeO 2 and ZrO 2Gd 2O 3 produced by co-evaporation at 550 °C was studied in order to determine the effect of dopant concentration lattice parameters, average particle size and residual stress. A cubic lattice parameter in the ZrO 2MgO system was found to decrease slowly with increasing MgO mole percentage whilst it increases linearly for the ZrO 2CeO 2 and ZrO 2Gd 2O 3 systems. Particle size was found to be lower than 200 Å for the samples investigated but films were crystalline. A merely indicative stress study in stabilized samples shows tensile stresses in the ZrO 2MgO system. Residual stresses were highly compressive in the two other systems.
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