Abstract

Lead-free 0.5Ba(Zr0.2Ti0.8)O3–0.5(Ba0.7Ca0.3)TiO3 (BZT–BCT) and the La0.5Sr0.5CoO3 (LSCO) bottom electrode films were epitaxially grown onto the CeO2/Y0.15Zr0.85O1.93 (YSZ) buffered Si (001) substrates via pulsed laser deposition. The lattice alignments between CeO2/YSZ and BZT–BCT/LSCO showed a 45° twisted cube-on-cube epitaxial relationship, indicating a high crystallinity of the BZT–BCT and LSCO films. The constituent elements in the BZT–BCT/LSCO/CeO2/YSZ structure showed no distinct inter-diffusion between each layer. The BZT–BCT epitaxial films showed a well saturation of the polarization–electric field (P–E).

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