Abstract
Three-dimensional (3D) lattice plane microstructures were investigated at local regions in an epitaxial AlN thick film grown on a trench-patterned AlN/sapphire template. A 3D reciprocal lattice space mapping technique combined with cross-sectional X-ray microdiffraction using an appropriate Bragg reflection quantitatively revealed the inhomogeneity of the lattice structures in the AlN film without loss of spatial resolution. The results showed a strong correlation of the lattice plane tilt/twist and variations with respect to the void configuration, the patterning structure of the template, and the dislocation morphologies confirmed by transmission electron microscopy.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have