Abstract
Ongoing research on the fabrication, performance, and application of microsensors is described from the viewpoint of their use for heat transfer and fluid flow measurements. Fabrication techniques that provide micromachining capabilities for various microscale elements are discussed. The thermal and fluid microenvironment characteristic of these sensors is addressed in detail. Performance characteristics of prototype pressure sensors, humidity sensors, microviscometers, thermistors, thermocouples, and flowmeters are presented. The operation of several integrated microsensors is discussed. Potential applications are mentioned, both as low-cost substitutes for existing transducers and as specialty devices for high spatial resolution and fast response needs. Finally, the use of these ultrasmall-scale transducers for fundamental research related to miscroscale heat and mass transfer is explored.
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