Abstract
The status of microscopic X-ray fluorescence analysis with tube excitation and synchrotron radiation is reviewed in terms of the lateral resolution, minimum detection limits and elemental sensitivity that can be achieved. As illustrations, the utilization of two typical state-of-the-art instruments for the analysis of geological material is described; one of the instruments is based on tube excitation, the other is installed at a synchrotron X-ray source. The analytical implications of the use of X-ray microprobes installed at a third generation storage ring, and in particular at the European Synchrotron Radiation Facility (ESRF), are discussed.
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