Microscopic vibration suppression for a high-speed macro-micro manipulator with parameter perturbation

Abstract

This paper reports electromechanical dynamics modeling and microscopic vibration suppression for a high-speed macro–micro manipulator with structural flexibility and parameter perturbation. The macro–micro manipulator contains an air-floating macro-motion platform and a macro-fiber-composite (MFC) micromanipulator. The electromechanical dynamics model is derived by combining the assumed mode method and the asymmetric Prandtl-Ishlinskii hysteresis model. Then, a robust control strategy combining a perturbation H-infinity controller with a Kalman filter is proposed to compensate for the hysteresis nonlinearity and suppress the microscopic vibration during and after the macro motion. In particular, an additive perturbation is used to estimate the model uncertainties from the varying end mass and all other unknown dynamics. Also, the Kalman filter is designed to improve the signal-to-noise ratio of the displacement detection based on the process and measurement noises. Several experiments are conducted to validate the effectiveness and feasibility of the proposed dynamic model and robust controller. The elastic vibrations during and after macro motion are significantly suppressed even with the parameter perturbation. Thus, the proposed control strategy can improve the manipulation stability, robustness, and accuracy.