Microscopic Simulation of the RF Performance of SiGe HBTs With Additional Uniaxial Mechanical Stress

Abstract

A very detailed investigation of high-speed silicon–germanium (SiGe) heterojunction bipolar transistors (HBTs) showed an underestimation of the measured peak cutoff frequency by simulations with a hydrodynamic (HD) model. It was speculated that this might be due to a breakdown of the HD approximation or unknown additional mechanical stress. We repeated those simulations with the more fundamental Boltzmann transport equation (BTE) based on the same device model (doping profiles, 2-D geometry, parasitics, and so on) and obtained almost similar results showing that this failure was not due to a breakdown of the HD approximation. Since additional uniaxial stress along the direction of the lateral base has been shown to increase the cutoff frequency, we investigated this effect. We found by 2-D device simulations that the increase in the peak cutoff frequency is rather small, and at high stress levels, it even decreases, if the uniaxial stress is applied homogenously. This is due to the reduction of the conductivity of the highly doped collector layer by the stress. If the stress is limited to the intrinsic transistor, the increase in the cutoff frequency is monotonic with growing stress. On the other hand, the collector current for a given base–emitter voltage also increases with stress leading to an overestimation of the collector current compared with the measurements. If this increase is corrected by a slight decrease in the germanium profile, the gain in the peak cutoff frequency is lost. Thus, the underestimation of the peak cutoff frequency cannot be explained by an additional homogeneous uniaxial stress in the intrinsic transistor.