Abstract
A novel microscopic line-scan profilometer comprising an interference module, a Z-stage for carrying the sample, a microscopic module, and a signal and image processor is to be introduced; of which the interference module projects a white light interference pattern on the sample, and the profilometer reconstructs the profile of the sample by inspecting the shift of the zeroth-order fringe as the sample is carried to experience a vertical scan. This letter will also present the experimental setup for implementing the profilometer and the results from the uses of the setup; the results not only validate the profilometer but also exhibit a performance of 9.4 and 0.63 μm in measurement resolution and standard deviation, respectively.
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