Microscopic grid methods—resolution and sensitivity

Abstract

The grid method is combined with microscopy and Fourier transform technique for micro deformation measurement. The spatial resolution and sensitivity for displacement measurement is discussed. It is found that the upper limit of spatial resolution is one grid pitch. Nevertheless, spatial resolution in micron to sub-micron region can be achieved despite this degradation. The limitation of sensitivity of grid technique is also considered. Experimental verification using optical microscope, scanning electronic microscope, and atomic force microscope is carried out. Degradation in spatial resolution is analyzed for each test example. Despite this, degradation spatial resolution in sub-micron region can be achieved.