Microscopic deformation mechanism and residual plastic accumulation in cross-connection area in nano-grooving process of Zr-based metallic glass

Abstract

Metallic glass plays a significant role in precision micro-molding and has increasingly gained attention in surface micro-nano structure processing technology. However, the current cutting processes of metallic glass surface micro/nanostructures are still facing several issues, such as burrs and defects. The research on surface structure defects at the nanoscale, specifically residual plastic accumulation in the cross-connection area (PACA), has not been explored. This paper analyzes the material removal process of a nano-groove from the Cu-Zr metallic glass surface, along with the deformation and chip separation mechanism under nanoscale conditions. The results indicate that there are no burrs or defects in cross-areas of surface micro/nanostructures for nano-scale cutting depths. PACA is identified as the primary factor that affects shape accuracy of nanometer microstructures. The study also clarifies the influences of machining parameters (such as tool geometry, workpiece temperature, and cutting process repeats) on material removal process and provides an optimization scheme for solving PACA in cross-areas. These findings offer direct theoretical guidance in understanding the material shear deformation mechanism and chip separation process of Cu-Zr metallic glass during the nano-grooving process, which will aid in solving PACA in cross-areas.