MICROSCOPIC AND MESOSCOPIC MODELS OF FILM GROWTH BY ENERGETIC CLUSTER IMPACT (ECI)

Abstract

Microscopic and mesoscopic models have been applied in order to describe the deposition of thin films onto solid surfaces by Energetic Cluster Impact (ECI). On the atomic scale, Molecular Dynamic (MD) Simulations of the impact of a single cluster onto the surface have been carried out. These simulations reveal, that the local slope of the surface is diminished by a downhill particle current induced by the impact. Introduction of this downhill current into a continuum description of the development of the film profile leads to the Edwards-Wilkonson-Equation. The parameters of this equation can be estimated from the MD-results. The analytic solution of the Edwards-Wilkinson-Equation gives the development in time of the power spectrum and the roughness of the film. The results are in good agreement with Atomic-Force-Microscopymeasurements (AFM) on copper films deposited by ECI.