Microscope autofocus algorithm based on number of image slope variations.

Abstract

This paper presents a passive autofocus algorithm applicable to interferometric microscopes. The proposed algorithm uses the number of slope variations in an image mask to locate the focal plane (based on focus-inflection points) and identify the two neighboring planes at which fringes respectively appear and disappear. In experiments involving a Mirau objective lens, the proposed algorithm matched the autofocusing performance of conventional algorithms, and significantly outperformed detection schemes based on zero-order interference fringe in dealing with all kinds of surface blemish, regardless of severity. In experiments, the proposed algorithm also proved highly effective in cases without fringes.