Microscale Chloride Sensor

Abstract

Measurements of chloride concentration are important in a range of applications. We report here on our progress toward the fabrication and testing of small, inexpensive chloride sensors integrated with sensing electronics on a CMOS chip. We describe and demonstrate a process for formation of gold and silver chloride/ silver electrodes on a CMOS chip. Cyclic voltammetry is performed on chip-scale electrodes and the test results are discussed.