Abstract
MicroRaman spectroscopy has been used in the present work to investigate the structure and composition of pyrolytic carbon (PyC) and SiC protective coatings formed under various chemical vapour deposition conditions. Analysis of spectra obtained during Raman line mapping experiments on samples with graded SixCy layer in the region of about 700–1000 cm−1 allows information to be extracted on different SiC polytypes. It was found that the graded SiC layered sample contained a mixture of 3C–SiC and 6H–SiC polytypes at the film/substrate interface, but for the major part of this layer the 3C–SiC (β-SiC) phase predominates. For pure PyC films, it was found that the formation of PyC layer begins at 1200°C and the layer formed at this temperature is more uniform with slightly larger crystallite size (∼3 nm) compared to that in the layer formed at 1300°C.
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