Micropower thermoelectric generator from thin Si membranes

Abstract

We report the development of a Si-based micro thermogenerator build from silicon-on-insulator by using standard CMOS processing. Ultrathin single-crystalline Si membranes, 100nm in thickness, with embedded n and p-type doped regions electrically connected in series and thermally in parallel, are active elements of the thermoelectric device that generate thermopower under various thermal gradients. This proof-of-concept device produces an output power density of 4.5µW/cm2, under a temperature difference of 5K, opening the way to envisage integration as wearable thermoelectrics for body energy scavenging.