Microporous silicon connected with silicon wires

Abstract

Structures combining Si wires and porous Si (PS) were fabricated by a two-step method, in which chemical etching and electrochemical anodization were applied to obtain the silicon wires and PS, respectively. The Si wires can be retained due to the existence of the depletion layer during the electrochemical anodization. The structure of PS connected with silicon wires is attractive to realize effective electric contact on PS.