Microplasma Source Circuit Using Microring Space–Time Distortion Control

Abstract

In this work, a microring circuit using space–time distortion control is proposed for plasma source applications. The microring circuit consists of a center microring with two small rings at its sides. The center microring circuit is embedded by a metallic film. The space–time control is applied to the circuit, where the minimum space–time distortion is achieved by the resonant optical path difference of the two-side rings. The whispering gallery mode (WGM) is established by the matching of the space–time distortion in terms of the optical path difference. The coupling between the WGM and electrons on the metallic film surface introduces the trapped electron cloud oscillation. The plasma frequency of the electron cloud is generated by the plasmonic wave oscillation, in which the plasma force can be calculated and obtained. The plasmaforce generated by selected metallic films is investigated for dried spray, force sensor, and electron cloud speed applications. By using the practical device parameters, the simulation results obtained have shown that the plasma frequencies of $1.93\times1016$ , $1.91\times1016$ , and $1.88\times 1016\,\,{\mathrm {rad}} \mathord {\left /{ {\vphantom {{\mathrm {rad}} s}} }\right. } s$ are obtained for gold, silver, and copper films, respectively. The force sensor sensitivity and electron cloud plasma speed are calculated.