Microplasma characteristics of direct-current atmospheric pressure glow discharge in dependence of gap distance and discharge current

Abstract

Microplasma at atmospheric pressure has been widely used in many fields due to the lower power consumption, higher plasma density, as well as better uniformity and stability. In this work, the microplasma characteristics of direct current atmospheric pressure glow discharge, including discharge morphology and electrical properties have been investigated with various interelectrode gaps (10–600 μm) and discharge currents (1–6 mA), and simultaneously, a finite element simulation has been conducted to obtain the distribution of the electric field and particle density. The evolution of cathode layer, anode layer and Faraday dark space at this scale was captured with a higher spatial resolution (∼1 μm) for the first time, demonstrating that the cathode layer, especially the cathode sheath rather than the positive column, plays a dominant role in the transition of the microplasma. As the gap shrinks to a size less than cathode layer (∼40 μm), the cathode sheath with a high electric field is compressed, leading to a rapid decrease of the discharge voltage. The discharge voltage remains basically unchanged regardless of the discharge current, because the electric field in the cathode sheath is limited by the accumulated space charge. The experimental results are well verified and explained by the simulation results. This study provides an in-depth understanding of the glow discharge mechanism at microscale, and of the stability of glow discharge at atmospheric pressure, and benefits to future research on the atmospheric pressure large-area microplasma and its related application.