Abstract

One-dimensional duct models yield the deflection of an idealized massless diaphragm subjected to pressure and vibration. Additional ANSYS models also include the effects of a flexible, thin diaphragm. These models are used to predict the acceleration pressure that a microphone senses when subject to vibration, in terms of the effective mass added by the loading due to nearby air. This effective mass value is shown to be proportional to one half the length of the back volume, plus the length of the front volume. Previously measured data from electrets and MEMS microphones are shown to support this conclusion. The length-dependence of the vibration pressure suggests that a shorter microphone with a diaphragm placed as close as possible to the outside air will have minimal vibration pressure sensitivity. [This work is supported by a grant from the NIH National Institute on Deafness and other Communication Disorders (1R01DC017720-01).]

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