Micropatterning on roll surface using photo-lithography processes

Abstract

A direct patterning for a barrier rib using the roll-imprinting process is getting more interests in display manufacturing fields. Master roll patterning is one of the important issues in the roll-imprinting process. In this study, a novel fabrication process of micro-patterning on a roller surface by applying the photolithography process is studied. Because the roller surface was a cylindrical shape, the designed pattern was made by using a film mask. Special jigs and roll holder were designed and used for the photolithography on the roll substrate. The roll patterning results showed a feasibility of the proposed method for the photolithography on the roll’s surface.