Micropatterning of SnO 2 thin films using hydrophobic–hydrophilic patterned surface

Abstract

SnO 2 micropatterns were prepared by using hydrophobic–hydrophilic patterned surfaces. Hydrophobic–hydrophilic patterned surfaces were prepared by selective UV-irradiation through a photomask on multilayered films of a very thin TiO 2 gel layer and a hydrolyzed fluoroalkyltrimethoxysilane layer. SnO 2 precursor solution prepared from SnCl 2 and ethanol was coated on the hydrophobic–hydrophilic patterned surfaces. Convexly shaped SnO 2 patterns were formed on hydrophilic area of the patterned surfaces. Thickness of these patterns was more than 1 μm. This patterning technique must have a wide variety of applications such as fabrication of micro-optical components and micropatterned oxide thin films.