Micropatterning of Porous Silicon Films by Direct Laser Writing

Abstract

In this study, we demonstrate that porous silicon films can be ablated by the pulsed nitrogen laser of a commercial MALDI mass spectrometer. The extent of laser-induced ablation was found to depend on the doping level and surface chemistry of the porous silicon film. Using direct laser writing with or without a mask, micropatterns were generated on the porous silicon surface. These micropatterns were subsequently used to guide the growth of mammalian cells including neuroblastoma. Excellent selectivity of cell growth toward the laser-ablated regions was established.