Microoptoelectromechanical acceleration transducer based on a roughly-accurate method of Fabry-Perot interferometer signal processing

Abstract

The use of microelectromechanical acceleration transducers is actual in control and navigation systems of aircraft. A microelectromechanical acceleration transducer with an optical reading unit based on a two-channel Fabry-Perot interferometer is considered. Proposed to analyze fractional part of the interference pattern’s fringe to improve the accuracy of the transducer. Changes in the output signal of the optical reading unit under the action of linear accelerations at various parameters of the beamtype sensitive element and change in the interferometer’s transmission at different reflectivity of the mirrors are investigated. The conditions for switching between two channels for bypassing zones with low sensitivity are determined according to the dependences of the interferometer transmission on displacement. A method for processing optical signals has been developed, which forms the output value by concatenating rough measurement results and the calculated accurate component. The proposed processing method makes it possible to increase the accuracy of the acceleration measurements without changing the conversion range.